Magnetoelectric sensors with cantilever geometry achieve great sensitivities on the order of 20 kV/cmOe by utilizing the mechanical resonance enhancement . Here, the cantilever quality factor serves as a figure of merit. There are several technologically approaches to increase the mechanical quality factor of cantilevers, e.g. reducing viscous damping or support losses. However, increasing the quality factor may also lead to increasing noise levels, originating form acoustic and thermal noise. In this contribution, we will discuss the impact of the quality factor onto the signal-to-noise ratio (SNR) of magnetoelectric sensors based on systematic cantilever geometry variation and operation under vacuum conditions. Approaches to increase the SNR will be high-lighted. The experiments are based on different magnetoelectric sensors consisting of 50 µm to 10 µm thick poly-silicon cantilevers (length 3 mm to 1 mm) . The functional materials are 2 µm AlN as piezoelectric phase and 2 µm FeCoSiB as magnetostrictive phase.
Funding by the Collaborative Research Center SFB 1261 is gratefully acknowledged.
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