Influence of a magnetostrictive layer on the mode shape and wave velocity of a Love-wave based SAW-deviceThursday (08.06.2017) 11:50 - 12:10 Förde II Part of:
Surface acoustic wave (SAW) based sensors are widely used for various applications such as filters or oscillators in electric devices, flow control in microfluidics and for biosensing. The use as magnetic field sensor based on the delta-E-effect  combined with Love mode waves  is proposed. A changed modulus of elasticity of the top layer causes a changed velocity of the propagating wave and a phase shift. From this the applied magnetic field strength is obtained. Here, a study is presented investigating the influence of the magnetic field induced change of the modulus of elasticity of the magnetostrictive top layer on the mode shape, wave velocity, and wavelength. The results will be compared to measurements. Furthermore, the frequency dependent amount of phase shift due to the change of the modulus of elasticity of the magnetostrictive layer is investigated. For this, a piezoelectric substrate with a SiO2 guiding layer and metglas as a magnetostrictive top layer is implemented in finite-element-method simulations [3, 4].
 R. Jahns, S. Zabel, S. Marauska, B. Gojdka, B. Wagner, R. Knöchel, R. Adelung, and F. Faupel, “Microelectromechanical magnetic field sensor based on ΔE effect,” Appl. Phys. Lett., vol. 105, no. 5, 2014.
 A. Malave, U. Schlecht, T. M. a. Gronewold, M. Perpeet, and M. Tewes, “Lithium Tantalate Surface Acoustic Wave Sensors for Bio-Analytical Applications,” 2006 5th IEEE Conf. Sensors, pp. 604–607, 2006.
 M. C. Krantz, J. L. Gugat, and M. Gerken, “Resonant magnetoelectric response of cantilevers with magnetostrictive and piezoelectric layers on opposite sides of the substrate,” AIP Adv., vol. 3, no. 6, p. 62135, 2013.
 J. L. Gugat, J. Schmalz, M. C. Krantz, and M. Gerken, “Magnetic Flux Concentration Effects in Cantilever Magnetoelectric Sensors,” IEEE Trans. Magn., vol. 52, no. 5, pp. 1–8, 2016.